Microfabrication of a 16 MHz 1D-pMUT-Array for Photoacoustic and Ultrasound Imaging

Abstract

In this paper, we describe the complete fabrication process of a 1D piezoelectric Micromachined Ultrasound Transducer (pMUT) array operating at 16 MHz underwater. We demonstrate the applicability of this pMUT Array in medical imaging using photoacoustic imaging (PAI) and ultrasound imaging (USI) experiments. There are 16 individual pMUT devices in the array, the radius of each device is 25 microns with a pitch of 100 microns (center-to-center). A 1-micron thick AlN (Aluminum Nitride) thin film is the piezoelectric material of choice for our pMUT array. This thin film was achieved by improving upon the control parameters in RF magnetron sputtering process. The working of this pMUT was validated by performing optical, electrical, and acoustic characterization. The 1D pMUT array was characterized optically using Laser Doppler Vibrometer (LDV) wherein the pMUT membrane showcased displacement of 6.2 pm/V for the in-air measurements at resonance of 20 MHz, the resonance frequency underwater was 16.2 MHz. Electrical characteristics were obtained through lock-in amplifier measurements, these were in close match to LDV results. Acoustical characteristics of the array was obtained through imaging experiments.