High-Frequency Annular Array Fabrication Using a Flex Circuit Matching Layer

Abstract

Fabricating arrays for high-frequency image applications such as ophthalmic imaging, intravascular imaging, and small animal imaging is challenging. For example, an array for intravascular imaging must be small enough to fit within the lumen of a catheter and inexpensive enough to be discarded after a single use. This article presents a new method for fabricating high-frequency annular arrays that is simple and inexpensive. The annular array elements are defined by the electrode pattern on a back surface of a polyimide quarter-wavelength matching layer that is glued to the front face of a ceramic transducer substrate (PZT5H). Electrical losses associated with bonding the matching layer to the transducer substrate are reduced by fabricating a second set of electrodes on the transducer substrate and then bonding the substrates using an anisotropic conductive epoxy. The feasibility of this technique was established by fabricating a seven-element, 20-MHz, 5-mm diameter annular array. The prototype array produced a pulse with a −6-dB factional bandwidth of 50%, an insertion loss of 22 dB, and secondary lobes in the radiation pattern at f/2 that decreased to −65 dB with respect to the main lobe with a peak amplitude of −53 dB.