Design and fabrication of a micro-actuator based on an electromagnetic membrane device

Abstract

The purpose of this study is to develop a micro-actuator manufactured by microelectromechanical system-based fabrication and electroplating techniques. This actuator presents a novel technique in electromagnetic fabrication with a smaller physical size than its traditional counterparts and provides a faster response time at a lower cost. A micro-coil structure is released from FeCl₃ etchant and bonded on a thin film (Parafilm ‘M’ Pechiney Plastic Packaging Inc.) to achieve an actuator-membrane structure. When an external AC power is applied to a micro-coil, a magnetic field is created to attract and repel through an NdFeB permanent magnet, and the displacement of the membrane is increased by AC. The results show that the measured magnetic field intensity weakens as the distance between the coil and the Gauss meter probe increases. However, it is observed that the magnetic field intensity does not increase linearly with the number of series coils, because of the distance between them.