An integrated laboratory and lecture course for teaching silicon microcircuit design and fabrication to final-year undergraduates is described. A key feature is that student designs are implemented on Ferranti uncommitted logic arrays by direct-write electron-beam lithography, thus providing rapid turnround at low unit cost.
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References
1.
Ferranti U.L.A. design manual Ref: A/F002, Ferranti Electronics Ltd., Fields New Road, Chadderton, Oldham, Lancashire OL9 8NP, England
2.
‘Customization of uncommitted logic arrays using electron beam lithography’, HardyC. J., Proceedings of Microcircuit Engineering81, Lausanne, Switzerland
