Student interest in degree-level courses on silicon devices and microelectronics can be greatly increased by laboratory work on device fabrication. In teaching, yield and chip sophistication are not important, and homemade or second-hand processing equipment is adequate. Various approaches to device fabrication and the related measurements are described in this paper.
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References
1.
AnnerG. E.‘Laboratory for Fabrication of Solid State Devices’1978 Frontiers in Education Conference Proceedings, IEEE, New York, pp. 133–135 (1978).
2.
BeynonJ. D. E. and BloodworthG. G.‘A Practical Approach to the Teaching of Integrated Circuit Design’Proceedings of the Conference on the Teaching of Electronic Engineering in Degree Courses, University of Hull Paper 9 (1973).
3.
BurgerR. A. and DonovanR. P.Fundamentals of Silicon Integrated DevicesVol. 1, Prentice-Hall (1967).
4.
GlaserA. B. and Subak-SharpeG. E., Integrated Circuit EngineeringAddison-Wesley (1977).