The fabrication of microcircuits can be efficiently pursued at a university if a clear philosophy is maintained to make the fabrication facility as useful and as economical as possible. The questions of what equipment should be purchased and how sophisticated it should be must be answered in a logical way.
Get full access to this article
View all access options for this article.
References
1.
GaylordT. K., ‘A Laboratory Photomask Production Facility’, Rev. Sci. Instrum., 43, 1268–1272 (1972).
2.
from Emulsitone Co., Whippany, N.J. 07981.
3.
FeldmanJ. M., ‘Semiconductor Device and Integrated Circuits Laboratories: A Survey of Current Educational Practice’, IEEE Trans. Education, E-16, 2–10 (1973).
4.
such as Epo-Tek from Epoxy Technology, Inc., Watertown, Mass. 02172.
5.
such as Ultipor 0.12 MCY 1001 URK2 from Pall Trinity Micro Corp., Cortland, N.Y. 13045.
6.
such as red Para-Paque 2262 from Para-Tome, Inc., Hillside, Illinois 60162 (appears semitransparent to the eye to allow easy alignment with other artwork but is photographically opaque).
7.
such as Albanene from Keuffel and Esser Co., Morristown, N.J. 07960.
8.
HRP from Eastman Kodak, Rochester, N.Y. 14650.
9.
such as desert gold Con-Tact paper from Comark Plastics, New York, N.Y. 10018.
10.
This corresponds to a maximum of 100 particles/ft3 in the size range from 0.5 micron to 5.0 micron. Room air contains approximately 106 particles/ft3 in this range.
