Abstract
Get full access to this article
View all access options for this article.
References
1.
Chapman
, Glow Discharge Processes , Wiley Interscience .
2.
Elliot
, Integrated Circuit Fabrication Technology , McGraw Hill .
3.
Sze
S M
VLSI Technology , McGraw Hill .
4.
O'Hanlen
J F
A User's Guide to Vacuum Technology , Wiley Interscience .
5.
McArthur
M
‘Safety in Dry Etching and System Automation’ , Semiconductor International
1982 .
6.
Rust
R D
Rhodes
R J
Parker
A A
‘Uniform Plasma Etching of Printed Circuit Boards’
Solid State Technology , April 1984 .