Abstract

Get full access to this article
View all access options for this article.
References
1.
A selection of some recent publications related to the topics discussed.
2.
Ruthberg
S.
‘Pressure measurements for the range 1 kPa to 100 μPa’ , Experimental thermodynamics , Vol 2 , IUPAC, Butterworth , London , 1975 , 229 –272 .
3.
Steckelmacher
W.
‘Conference on calibration of vacuum gauges’ , Vacuum , 1967 , 17 , 433 –437 .
4.
Steckelmacher
W.
‘Standards in vacuum’ , Phys, Techn , 1976 , 93 –95 .
5.
Eschbach
H. L.
‘Calibration of vaccum gauges (in German) , Commission of the European Communities, Joint Nuclear Research Centre, Geel, CBNM , Luxembourg , Report EUR 4797d, 1972 , 34 pp.
6.
Ruthberg
S.
‘Standards and vacuum measurements accuracy’ , J Vac Sci Techn , 1972 , 9 , 188 –195 .
7.
Redhead
P. A.
‘Very low pressures and ultra low pressures (below 10−6 torr)’ , Experimental thermodynamics , Vol 2 , IUPAC, Butterworths , London , 1975 , pp 273 –301 .
8.
Poulter
K. F.
‘The calibration of vacuum gauges’ , J Phys E Sci Instrum , 1977 , 10 , 112 –125 .
9.
Steckelmacher
W.
‘Can we really measure low pressure?’ , Bull Inst Phys and Phys Soc , 1967 , 284 –289 .
10.
Kleber
P.
‘Pressure, what does it mean in vacuum chambers with cryosurfaces’
Vacuum , 1975 , 25 , 191 –196 .
11.
Brombacher
W. G.
Johnson
D. P.
Cross
J. L.
‘Mercury barometers and manometers’ , NBS Monograph 8, 1960 , 59 pp.
12.
Brombacher
W. G.
‘Survey of micromanometers’ , NBS Monograph 114, 1970 , 62 pp.
13.
Guildner
L. A.
Terrien
J.
‘Mercury absolute manometers’ , Experimental thermodynamics , Vol 2 , IUPAC, Butterworths , London , 1975 .
14.
Thomas
A. M.
Cross
J. L.
‘Micrometer-U tube manometers for medium vacuum measurements’ , J Vac Sci Tech , 1967 , 4 , 1 –5 .
15.
Ruthberg
S.
‘Calibration to high precision in the medium vacuum range with stable environments and micromanometer’ , J Vac Sci Tech , 1969 , 6 , 401 –412 .
16.
Los
J. M.
Morrison
J. A.
‘A sensitive differential manometer’ , Rev Sci Instrum , 1951 , 22 , 805 –809 .
17.
Guildner
L. A.
Stimson
H. F.
Edsinger
R. E.
Anderson
R. L.
‘An accurate manometer for the NBS gas thermometer’ , Metrologia , 1970 , 6 , 1 –18 .
18.3.3 Optical interference .
19.
Aubry
B.
Delbart
R.
‘Differential interferometer manometer system Peube’ , Le Vide , 1965 , 117 , 194 –199 .
20.
Delbart
R.
‘A micromanometer of high sensitivity' (in French) , Trans 3rd Int Vacuum Congr , 1966 , 2 , 255 –258 .
21.
Truffier
J. L.
Chomoff
P. S.
‘Accuracy of (Δp/p ) < 10−7 obtained on a differential interferometric manometer’ , Proc 6th Int Vac Congr, Jap J appl Phys , 1974 suppl 2, pt 1, 139 –142 .
22.
Jansen
C.
Venema
A.
‘A McLeod manometer with prescribed volume for use as a standard instrument’ , Vacuum , 1959 , 9 , 219 –229 .
23.
Podgurski
H. H.
Davis
F. N.
‘A precision McLeod gauge for volumetric measurement , Vacuum , 1960 , 10 , 377 –381 .
24.
Gulyaev
M. A.
Eryukhin
A. V.
‘Achievements of high vacuum metrology’ , Measurement techniques , 1967 , No 11, 1361 –1365 .
25.
Bromberg
J. P.
‘Accurate pressure measurements in the regions 0.1−1000 mtorr; the inter calibration of two McLeod gauges and a capacitance manometer’ , J Vac Sci Tech , 1969 , 6 , 801 –808 .
26.
Tvorogov
I. V.
Khavkin
L. P.
‘Absolute calibration of manometric transducers by the method of comparison with a compression manometer in cryostated installation' , Prib Tekh Fk sp , 1972 , No 3 162 –164 . English Translation, In strum Exp Tech, 15, No 3, pt 2, 808–805.
27.
Dadson
R. S.
Elliott
K.
Woodman
B.
‘The Mcleod gauge vapour streaming effect’ , Proc 4th Int Vac Congr, 1968 , 679 –682 .
28.
Takaishi
T.
Sensui
Y.
‘Study of the mercury streaming vapour drag effect in vacuum measurements’ , Vacuum , 1970 , 20 , 495 –499 .
29.
Thomas
L. B.
Harris
R. E.
Krueger
C. L.
‘Observations and measurements of the mercury pumping effect on several gases by four methods, Proc 6th Int Vac Congr , Jap J appl Phys , 1974 Suppl, 2 pt 1, 151 –154 .
30.
Schuhmann
S.
‘Study of Knudsen's method of pressure division as a means of calibrating vacuum gauges’ , Trans 2nd Int Vac Congr , 1962 , 1 , 463 –467 .
31.
Barton
R. S.
Chubb
J. N.
‘Some improvements in the gas expansion method of gauge calibration’ , Vacuum , 1965 , 15 , 113 –115 .
32.
Holanda
R.
‘Evaluation of a volume ratio calibration n system for vacuum gauges from 10−6 to 10−3 torr’ , NASA Technical Note NASA TND-3100, 1965 , 17 pp.
33.
Elliott
K. W. T.
Woodman
D. W.
Dadson
R. S.
‘A study of the Knudsen and Mcleod gauge methods for the calibration of high vacuum gauges’ , Vacuum , 1967 , 17 , 439 –440 .
34.
Bennewitz
H. G.
Dohmann
H. D.
‘Dynamic pressure calibration' (in German)’ , Vak Techn , 1964 , 14 , 8 –12 .
35.
Owens
C. L.
‘Ionisation gauge calibration system using a porous plug and orifice’ , J Vac Sci Tech , 1964 , 2 , 104 –108 .
36.
Fletcher
B.
Watts
J. F.
‘The design and construction of an absolute precision calibration system’ , Vacuum , 1967 , 17 , 445 –448 .
37.
Fletcher
B.
‘A dynamic pressure reduction system used for the calibration of a mass spectrometer’ , Vacuum , 1970 , 20 , 377 –380 .
38.
Gulyaev
M. A.
Eryukhin
A. V.
Kouzmine
V. V.
‘Precision of apparatus for the calibration of vacuum gauges by the absolute pressure reduction method' (in French) , Le Vide , 1970 , No 148–149, 192 –197 .
39.
Gulyaev
M. A.
Eryukhin
A. V.
‘Development of master instruments for measuring total and partial pressures in high and ultrahigh vacuum regions’ , Meas Techn , 1971 , 14 , No 11 , 1662 –1669 .
40.
Poulter
K. F.
‘Vacuum gauge calibration by the orifice flow method in the pressure range 10−4−10 Pa’ , Vacuum , 1978 , 28 , 135 –141 .
41.
Choumoff
P. S.
Aubry
B.
‘Calibration of ionisation gauge by the method of variable conductance’ , Le Vide , 1965 , 20 , No 117 , 177 –185 .
42.
Calcatelli
A.
Ferrero
C.
Rumiano
G.
Ughi
G.
‘A comparative study of the metrological characteristics of a fixed and variable conductance dynamic system for gauge calibration’ , Proc 6th Int Vac Congr, Jap J appl Phys , 1965 , Suppl 2, pt 1, 127 –130 .
43.
Kuzmin
V. V.
Nabiullin
V. K. H.
‘Installation for the calibration of vacuum-meters’ , Instr Exp Tech , 1975 , 18 , No 5 , 1535 –1537 .
44.
Davis
W. D.
‘Ultrahigh vacuum calibration’ , J Vac Sci Tech , 1968 , 5 , 23 –33 .
45.
Bernadet
H.
Choumoff
P. S.
Iapteff
B.
‘System for measurement and calibration 10−5 to 10−12 torr’ , Le Vide , 1970 , No 147, 131 –136 .
46.
Sharevski
B. A.
‘Ultrahigh vacuum apparatus for calibration and collation of ionisation gauges’ , Instrum Exp Tech , 1967 , 4 , 171 –176 .
47.
Grosse
G.
Messer
G.
‘Experiences with cryopumps in calibration devices’ , Vacuum , 1970 , 20 , 373 –376 .
48.
Poulter
K. F.
‘An apparatus for calibrating vacuum gauges in the UHV region’ , J Phys E , 1974 , 7 , 39 –44 .
49.
Holland
L.
Priestland
C.
‘Measurement of variation of molecular impact rate within a spherical calibration vessel’ , Vacuum , 1967 , 17 , 461 –468 .
50.
Hayward
W. H.
Jepsen
R. L.
‘A simple vacuum gauge calibration system’ , AVS , 1962 , pp 459 –462 .
51.
Chubb
J. N.
Gowland
L.
‘Experience with a pulsed gas flow technique for calibrating vacuum gauges’ , Vacuum , 1967 , 17 , 449 –445 .
52.
Müller
D.
‘A simple gas inlet system for precise adjustment of low pressures’ , Z angew Phys , 1967 , 23 , 467 –470 .
53.
Bannenberg
J. G.
Tip
A.
‘A calibration system for total pressure gauges in the range 10−3−10−5 torr’ , Proc 4th Int Vac Congr, 1966 , 609 –612 .
54.
Nakayama
K.
Hojo
H.
‘Relative ion gauge sensitivities to various hydrocarbon gases’ , Proc 6th Int Vac Congr, Jap J appl Phys , 1974 , Suppl, 2 , pt 1, 113 –116 .
55.
Peggs
G. N.
‘The measurement of gas throughput’ , NPL Report MOM 14, 1975 , Division of Mechanical and Optical Metrology, NPL , Teddington .
56.
Peggs
G. N.
‘The measurement of gas throughput in range 10−4 to 10−10 Pa m3 s−1’ , Vacuum , 1976 , 26 , 321 –328 .
