A Miniature Silicon Photo-Acoustic Detector for Gas Monitoring Applications

Rogne H : MOEMS for Environmental Monitoring, MOEMS ‘99..

Hagen : Infrared Radiator, US Patent No 4,644,141 (Feb 1987).

Kanstad : Pulsating Infrared Radiation Source, US Patent No 5,220,173 (June 1993).

Kocache : Infrared Source, US Patent No 5,324,951 (June 1994).

Laine : An Infrared Radiating Emitting Device, WO Patent No 96/12165 (April 1996).

Nordahl : Infrared Emitter and Methods for Fabricating the Same, WO Patent No 97/09593 (March 1997).

Kanstad : Efficient Metallic Infrared Radiation Source, WO Patent No 97/04623 (Feb 1997).

Karlsson : Infrared Radiation Source for a Gas Analyzer and a Method for Generating Infrared Radiation, EP Patent No 0 692 702 A1 (Jan 1996).

Kreuzer LB : Ultralow Gas Concentration Absorption Spectroscopy, J of Applied Physics, vol 42, no 7, June 1971, pp. 2934.

Rosengren LG : A New Theoretical Model of the Opto-Acoustic Gas Concentration Detector, Infrared Physics, vol 13, 1973, pp.109.

Brüel Kjær : Gas Monitoring, Technical Review of Brüel & Kjær, no 1, 1990.

Ferber A Bernstein R : Photo-Acoustic Detector Based Gas Sensor: Basic Concept and Feasibility, ESPRIT Project 8058, 1995.