Micro-Scale Electrohydrodynamic Pumped High Performance Actuation

Abstract

A new type of actuation device has been conceptualized that meets the needs of both large displacement force and bandwidth within a package more compact than the currently available magnetostrictive and stack-type piezoelectric actuators of similar rating. This concept relies on micro-scale electrohydrodynamic (EHD) pumping of a dielectric liquid within small channels. Configured as an actuator, the EHD pump(s) would be used to move fluid between two reservoirs—each having a compliant membrane that interfaces to the world to provide the means to achieve vibration cancellation or micro actuation.

Ordinarily limited to generating flow in macroscale applications, the EHD pump, when operating in a thermal induction mode, is shown to exhibit an exciting scaling law as its size is reduced. As the pump volume to surface area decreases, the energy going toward increasing pressure in the pump has an increasingly larger effect. Since the volume/surface area is proportional to 1/a, where a is the characteristic width or diameter of the channels comprising the pump, the pressure head generated scales similarly. Analytical and numerical studies have shown the EHD-pumped actuator to be capable of delivering equal force and bandwidth to magnetostrictive and stack-type piezo actuators, but with considerably greater displacement and a smaller size. Further, this type of actuator offers the possibility for deployment in active vibration control or micro actuation applications at significantly greater temperatures than for piezoelectric and magnetostrictive devices.

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References

1. Stuetzer, O. M. , “Iron Drag Pressure Generation,” J. of Applied Physics, Vol. 30, 1959.

2. Stuetzer, O. M. , “Iron Drag Pumps,” J. of Applied Physics, Vol. 31, pp. 136-146, 1960.

3. Pickard, W. F. , “Iron Drag Pumping I Theory,” J. of Applied Physics, Vol. 34, 1963.

4. Pickard, W. F. , “Iron Drag Pumping II Experiment,” J. of Applied Physics, Vol. 34, 1963.

5. Sharbaugh, A. H. and Walker, G. W.

, “The Design and Evaluation of an Iron-Drag Dielectric Pump to Enhance Cooling in a Small Oil-Filled Transformer,”

IEEE-IAS Meeting, Mexico City, Oct. 19, 1983.

6. Melcher, J. R. , “Traveling-Wave Induced Electroconvection,” Phys. Fluids, Vol. 9, pp. 1548-1555, 1966.

7. Okapal, M. F., “Traveling-Wave Generation and Electrohydrodynamic Pumping with a Single-Phase Voltage Supply,” MS Thesis, University of Illinois, 1978.

8. Krein, P. T., “Analysis and Operation of an Electrohydrodynamic Pump Using a Single-Phase Voltage Supply,” MS Thesis, University of Illinois, 1980.

9. Krevin, D. J., “Three-Phase Variable Parameter Electrohydrodynamic Pumping,” MS Thesis, University of Illinois, 1981.

10.

10. Kuo, B. “Flow Characteristics and Heat Transfer for Pressure and Electric Field Driven Laminar Flow with Temperature-Dependent,” Ph.D. Dissertation, University of Illinois, 1982.

11.

11. Seyed-Yagoobi, “Theoretical, Numerical, and Experimental Study of Electrohydrodynamic Pumping in Vertical Configuration,” Ph.D. Dissertation, University of Illinois, 1984.

12.

12. Crowley, J. M. , Wright, G. and Chato, J.

“Selecting a Working Fluid to Increase the Efficiency and Flow Rate of an EHD Pump,”

IEEE Transaction on Industry Application, Vol. 26, Jan. 1990.

13.

13. Bart, S. F. , Tavrom, L. S. , Mehregany, M. and Lang, J. H. , 1990, “Microfabricated Electrohydrodynamic Pumps, Sensors and Actuators, A: Physical Vol. 21 No. 1-3, 1990, pp. 193-197.

14.

14. Richter, A. and Sandmaier, H. , “An Electrohydrodynamic Micropump,” Proc. of IEEE MEMS, pp. 99-104, 1990.

15.

15. Fuhr, G. , Schnelle, T. and Wagner, B. , 1994, “Travelling Wave-Driven Microfabricated Electrohydrodynamic Pumps for Liquids, J. of Micromech. Microeng., Vol. 4, pp. 217-226.

16.

16. Choi, J. and Kim, Y. , “Microelectrohydrodynamic Pump Driven by Traveling Electric Fields,” Proc. of IEEE IAS, pp. 1480-1484, 1995.

17.

17. Smith, D. R. Parekh , D. E. Kibens and Valdis, Glezer, Ari . Thrust vectoring with hybrid synthetic jet actuators High Speed Jet Flows American Society of Mechanical Engineers, Fluids Engineering Division (Publication) FED. Vol. 8, 1997. ASME, New York, NY, USA.

18.

18. Bhagat, W. W. , King, W. P. and Hallinan, K. P. , 1997, “Electrohydrodynamic Enhancement of Heat Transport Capacity of a Micro Heat Pipe,” presented at the 1997 International Heat Transfer Conference, Kanpur, India, Dec. 29-31.

19.

19. Hallinan, K. P. , Bhagat, W. W. , Kashaboina, B. and Kashani, R. “Electro-hydrodynamic Augmentation of Heat Transport in Micro Heat Pipe Arrays,” 1998, to be presented at the 1998 ASME-ISE, Anaheim, California, November.

20.

20. Kashani, R.

“High Power Actuators in Intelligent Rotor Application,”

Proceedings of the 1993 SPIE North American Conference on Smart Structures and Materials, Albuquerque, NM, Feb. 1993.

21.

21. Little, E. , Kashani, R. Kohler, J. and Morrison, F. , “Tuning of an Electro-rheological Fluid-Based Helmholtz Resonator as Applied to Hydraulic Engine Mounts,” Transportation Systems, Kashani, R. Editor, the ASME Book #G00898, DSC-Vol. 54, 1994, pp. 43-51.

22.

22. Francais, O. , Dufour, I. and Sarraute, E. , 1997, “Analytical Static Modelling and Optimization of Electrostatic Micropumps,” J. Micromech. Microeng., Vol. 7, pp. 183-185.

23.

23. Bourouina, T. , Bosseboeuf, A. and Grandschamp, J-P , 1997, “Design and Simulation of an Electrostatic Micropump for Drug-Delivery Applications, J. Micromech. Microeng., Vol. 7, pp. 186-188.

24.

24. Kang, S., “Feasibility Study of New Concept EHD-Driven MicroPumped Actuator,” Ph.D. Dissertation, University of Dayton, 1999.

25.

25. Flower, W. “Understanding Hydraulic Mounts for Improved Vehicle Noise, Vibration, and Ride Qualities” SAE #85079.

26.

26. Singh, R. , “Linear Analysis of Automotive Hydro-Mechanical Mounts” J. of Sound and Vibration, Vol. 158, No. 2, p. 219.