Fabrication of composite microstructures comprising more than one type of material has been a fundamental challenge in nanotechnology. In this study, we report a method that can be used for the direct fabrication of complex three-dimensional (3D) polymer/metal hybrid microstructures. The patterning of materials (a polymer and a metal coatable polymer) in selected regions was achieved by a two-photon stereolithography process using a dual-stage scanning process. A precise alignment process was perfected to achieve the coincidence of polymeric and metal-coated polymer components of the microstructure. Selective metallization of the metal coatable polymer microstructure was performed through silver deposition by means of electroless plating. The 3D microcoil was demonstrated and electrically characterized.
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