Water sorption in thin films of high-temperature polyimides: the effect of imidization history

Abstract

PMDA-ODA and BPDA-PDA polyimides in 10-50 Atrn thick films were prepared from the respective poly(amic acid) precursor by thermal imidization for 1-10 h at various temperatures over 230-400C. Their water sorption behaviours were studied in detail by gravimetry. Water sorption in both PMDA-ODA and BPDA-PDA followed a nearly Fickian process in spite of the morphological heterogeneity due to the ordered and less ordered phases. Water clustering or plasticization was very weakly evident on the water uptake versus humidity plots. Water sorption in both polyimides was highly dependent upon imidization history. Both diffusion coefficient and water uptake are decreasing functions of imidization temperature and time. This resulted mainly from the enhancement of overall crystallinity by high-temperature imidization because of their high-rT nature. The diffusion coefficient and water uptake were (1.0-3.0) x 10^-9 cm² s-1 and 0.4-4.5 wt% for PMDA-ODA and (0.9-3.0)x 10-cm^2s-' and 0. I2-2.40wt%, depending on humidity,/iihidization history and film thickness. The differences between the water sorptions of the p'olyimides are interpreted by considering the differences in their morphologies and chemical affinities to water.

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References

[1] Tummala R R and Rymaszewski E J (ed) 1989 Microelectronic Packaging Handbook (New York: van Nostrand Reinhold)

[2] Manzione L T 1990 Plastic Packaging of Microelectronic Derices(New York: van Nostrand Reinhold)

[3] Mittal K L (ed) 1984 Polvinidees: Synthesis, Characteri:ayion and Applications (New York: Plenum)

[4] Feger C . Khojasteh M M and McGrath J E (ed) 1989 Povrinides: Materials. Chetis.trlr and Clharacteriation (Amsterdam: Elsevier)

[5] Feger C , Khojasteh M M and Htoo M S (ed) 1993 Adrances in Polyimnide Science and Technology (Lancaster. PA: Technomrnic)

[6] Moylan C R . Best M E and Ree M 1991 J. Polynm. Sci.: Polyrn. Phtys. Ed. 29 87-87

[7] Smith F W . Neuhaus H J and Senturia S D 1987 J. Electron. Mater. 16 93-93

[8] Furman B K . Childs K D , Clearfield H , Davis R and Purushothaman S 1992 J. Vaec. Sci. Technol. A 10 2913-2913

[9] Tchangai T . Segui Y and Doukkali K 1989 J. Appl. Polyn. Sci. 38 305-305

10.

[10] Wood J C 1978 Corrosion-NACE 34 70-70

11.

[11] Sacher E 1979 IEEE Trans. Elecrr.,Insul. 14 85-85

12.

[12] Sackinger S T and Farris R J 1987 Polyin. Mater. Sci. Eng. 57 356-356

13.

[13] Denton D D , Day D R , Priore D F , Senturia S D , Anolick E S and Scheider D 1985 J. Electron. Mfater. 14 119-119

14.

[14] Denton D D and Pranjoto H 1989 Mater. Res. Soc. Syntp. Proc. 154 97-97

15.

[15] Ree M , Yoon D Y , Depero L and Parrish W J. Polym. Sci.: Polym. Phys. Ed. submitted

16.

[16] Sroog C E 1976 J. Polym. Sci. Macromol. Rev. 11 161-161 and references therein

17.

[17] Numata S , Fujisaki K and Kinjo N 1987 Polymer 28 2282-2282

18.

[18] Hitachi Chemical Company 1988 Technical Brochure for PIQ It Products

19.

[19] E I du Pont de Nemours & Company 1990 Technical Brochure for Pyralin*' Products

20.

[20] Ree M , Chen K J , Kirby D P . Katzenellenbogen N and Grischkowsky D 1992 J. Appl. Phys. 72 2014-2014

21.

[21] Kapton film is the trademark of E I du Pont de Nemours & Company

22.

[22] Yang D K . Koros W J . Hopfenberg H B and Stannett V T 1985 J. Appl. Polyn. Sci. 30 1035-1035

23.

[23] Yang D K . Koros W J . Hopfenberg H B and Stannett V T 1986 J. Appl. Polymt. Sci. 31 1619-1619

24.

[24] Okamoyo K-I , Tanihara N . Watanabe H . Tanaka K . Kita H . Nakamura A . Kusuki Y and Nakagawa K 1992 J. Polymn. Sci.: Polyni. Pr1-s. Ed. 30 1223-1223

25.

[25] Lim B S . Nowick A S . Lee K W and Viehbeck A 1993 J. Polin. Sci.: Polvn'. Phy1s. Eel 31 545-545

26.

[26] Hubbell W H Jr , Brandt H and Munir Z A 1975 J. PoIJ'm. Sci.: Potny. Phis. Ed. 13 493-493

27.

[27] Sacher E and Susko J R 1979 J. Appl. Patyin. Sd. 23 2355-2355

28.

[28] Ree M . Swanson S and Volksen W 1991 Polym. Prepr (ACS} 32 308-308

29.

[29] Ree M , Swanson S and Volksen W 1993 Polymer 34 1423-1423

30.

[30] Jou J-H , Huang R , Huang P-T and Shen W-P 1991 J. Appl. Polym. Sci. 43 857-857

31.

[31] Weast R C (ed) 1989 Handbook of Chemtstry and Physics 66th edn (Cleveland, OH: CRC Press) B68-161

32.

[32] Fowkes F NI 1964 Adr. Chemn. Series 43 1-1

33.

[33] Crank J 1976 The Maheniatics qf Dtfisiont 2nd edn (New York: Clarendon)

34.

[34] Isoda S . Shimada H . Kochi M and Kambe H 1981 J. Polym. SCi.: Polym. Plhv.s. Ed. 19 1293-1293

35.

[35] Russell T P 1984 J. PoI. m. Phl.: Pohlnl. Phyis. Ed. 22 1105-1105

36.

[36] Ree M , Nunes T L and Lin J S 1994 Polymer 35 1148-1148

37.

[37] Takahashi N , Yoon D Y and Parrish W 1984 Macromolecules 17 2583-2583

38.

[38] Pranjoto H and Denton D D 1993 Advances in Polyimide Science and Technology ed C Feger et al (Lancaster, PA: Technomic) p 351-351

39.

[39] Ree M , Nunes T L and Kirby D P 1992 Polym. Prep. (ACS) 33 309-309