Sorption of methylene chloride vapor in polyimide films

Abstract

Sorption of metbylene chloride vapor into thin films of three different polyimides was measured by means of a quartz crystal microbalance (QcM) apparatus. Rate laws for sorption and desorption were determined. Based on these data, it is concluded that methylene chloride vapor swells these polymers, and that sorption into a previously swollen film is quicker than initial sorption into a fresh film. The implication of these results for microelectronic packaging is discussed.

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