Sorption of metbylene chloride vapor into thin films of three different polyimides was measured by means of a quartz crystal microbalance (QcM) apparatus. Rate laws for sorption and desorption were determined. Based on these data, it is concluded that methylene chloride vapor swells these polymers, and that sorption into a previously swollen film is quicker than initial sorption into a fresh film. The implication of these results for microelectronic packaging is discussed.
Get full access to this article
View all access options for this article.
References
1.
[1] Moylan C R. Best M E and Ree M1991J. Polym. Sci.B 2987-87771-771
2.
[2] Hubbell W H Jr, Brandt H and Munir Z A1975J. Polym. Sci., Polym. Phys. Ed.13493-493
3.
[3] Sacher E and Susko J R1979J. Appl. Polym. Sci232355-2355
4.
[4] Yang D K, Koros W J, Hopfenberg H B and Stannett V T1985J. Appl. Polym. Sci.301035-1035
5.
[5] Yang D K, Koros W J. Hopfenberg H B and Stannett V T1986J. Appl. Polym. Sci.311619-1619
6.
[6] Denton D D, Day D R, Priore D F, Senturia S D, Anolick E S and Scheider D1985J. Electr. Mater14119-119
7.
[7] Pawlowski W P. Jacobson M I, Teixeira M E and Sakorafos K G1990Mater. Res. Soc. Symp. Proc. vol 167 (Pittsburgh, PA: Materials Research Society) p 147-147
8.
[8] Pawlowski W P and Jacobson M I1992Polymer and Fiber Science: Recent Advarnces ed R E Fornes and R D Gilbert (New York: VCH)
9.
[9] Kapton is a registered trademark of E I DuPont de Nemours and Company; Upilex is a registered trademark of UBE Industries, Ltd
10.
[10] Best M E and Moylan C R1992J. Appl. Polym. Sci.45, 17-17
11.
[11] Yang R M and Tong H-M1985J. Polym. Sci., Polym. Lett. Ed.23583-583
12.
[12] Bonner D C and Cheng Y1975J. Polym. Sci., Polym. Lett. Ed.13259-259
13.
[13] Lu C and Czanderna A W1984Applications of Piezoelectric Quartz Crystal Microbalances (Amsterdam: Elsevier)
14.
[14] Rogers C E1985Polymer Permeability ed J Comyn (London: Elsevier)
15.
[15] Shib D-Y, Cataldo J, Galligan E, Graham W, McGouey R, Nunes S. Paraszczak J and Serino R1990J. Vac. Sci. Technol.A 81521-1521
