SU-8 polymer with talc particle (30 wt-%) and liquid perfluoropolyether (PFPE) (30 wt-%) fillers was used as a composite to fabricate conical tip-cantilever device. The composite tip demonstrated lower coefficient of friction (∼0.22) when compared with a tip made of pure SU-8 (∼0.65). Fluorine was detected on the wear track and the tip surface, which resulted from the transfer of PFPE from the tip to the wear track. The counterface made of pure SU-8 remained smooth and unworn when slid against the composite tip even after 1000 cycles of sliding. This composite with improved tribological and mechanical properties can be used for fabricating small component devices such as for micro-electro-mechanical systems (MEMS).
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