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Reactions of Trichlorophosphazo-N-Sulfurylchloride and its Derivatives I. Synthesis of a New Heterocycle Containing P,N,S,and C Atoms in its Six-membered Ring. Crystal Structures of (CH 3 ) 3 SiN(H)P(Cl 2 )NS(O 2 )Cl,(CH 3 ) 3 SiN(CH 3 )P(Cl 2 )NS(O 2 )C1,and P(Cl 2 )NS(O 2 )N(H)C(CH 3 )N at 150 K