ZnO:Al thin films were deposited on a glass substrate by a sol–gel method with a combined two-step, spin coating and growth treatment in a water bath. The effect of Al incorporation and the bath growth temperature on the crystal structure, morphology and optical properties of the samples are investigated. The results showed that the morphology of 3% Al-doped film was rod-like nanostructure at 40°С and granular at 60 and 90°С. The lattice strain increases after the Al-doping at 40 and 60°C. And the strain of 3% Al-doped film decreased with increasing the bath growth temperature. The optical band gap of pure and 3% Al-doped film at different bath growth temperature is calculated. Relatively better visible light transmittance and photoluminescence (PL) characteristics were obtained at 40°С. Blue emission associated with surface defects was observed.
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