Hydrogenated diamond-like carbon (DLC: H) films were successfully fabricated on the surface of 13Cr super martensitic stainless steel by high-pulsed power chemical vapour deposition. The mechanical and tribological properties of the films related to the substrate bias voltages were investigated. The results showed that the surface hardness and tribological properties of the substrate after DLC film deposition were improved. The DLC films became dense, the grain size and roughness reduced, and the deposition rates increased as the bias voltage increased. In addition, the dense DLC films directly led to high nanohardness and elastic modulus. The H content decreased with an increase in the bias voltage, which may be the primary reason for nanohardness and modulus enhancement. Due to the relatively high H/E* and H2/E*3 ratios of films corresponded to high elastic strain and plastic deformation resistances reduced the wear loss, and the localized graphitization on the surface provided solid lubrication.
MaXP, WangLJ, LiuCM, Microstructure and properties of 13Cr5Ni1Mo0.025Nb0.09V0.06N super martensitic stainless steel. Mater Sci Eng A. 2012;539(9):271–279.
2.
MaXP, WangLJ, LiuCM, Role of Nb in low interstitial 13Cr super martensitic stainless steel. Mater Sci Eng A. 2011;528(22):6812–6818.
3.
LuSY, YaoKF, ChenYB, Effect of quenching and partitioning on the microstructure evolution and electrochemical properties of a martensitic stainless steel. Corros Sci. 2016;103(6):95–104.
4.
MirzaeeM, MomeniA, AieniN, Effect of quenching and tempering on microstructure and mechanical properties of 410 and 410 Ni martensitic stainless steels. J Mater Res. 2017;32(3):1–10.
5.
BilmesPD, SolariM, LlorenteCL.Characteristics and effects of austenite resulting from tempering of 13Cr-NiMo martensitic steel weld metals. Mater Charact. 2001;46(4):285–296.
6.
SinghG, SinghS, GrewalJS.Erosion wear characterisation of DLC and AlCrN-based coated AISI-304/316 steels. Surf Eng. 2019;35(4):304–316.
7.
LitoriaAK, JoshiAA, JoshiMD, Wear behaviour of boronized and duplex-treated AISI 4140 steel against DLC-coated boronized AISI 4140 disc. Surf Eng. 2019;35(4):370–377.
8.
YuX, YangZ, CaiS, Influence of parameters on Al/Ti-DLC/DLC selective absorber film. Surf Eng. 2017;33(11):827–834.
9.
WangS, WangF, LiaoZ, Tribological behaviour of titanium alloy modified by carbon-DLC composite film. Surf Eng. 2015;31(12):934–941.
10.
JingW, GuichangL, JunX, Nanomechanical and Electrochemical properties of diamond-like carbon (DLC) films deposited by plasma enhanced chemical vapor deposition (PECVD) technique. Plasma Sci Technol. 2010;12(4):461–465.
11.
WasyA, BalakrishnanG, LeeS, Thickness dependent properties of diamond-like carbon coatings by filtered cathodic vacuum arc deposition. Surf Eng. 2015;31(2):85–89.
12.
LubwamaM, CorcoranB, SayersK.DLC films deposited on rubber substrates: a review. Surf Eng. 2015;31(1):1–10.
13.
QuB, HuangML, WuQH.Growth of three-dimensional graphene layers using plasma enhanced CVD. Surf Eng. 2015;31(2):140–145.
14.
HuangW, WangX, ShengM, Low temperature PECVD SiN x films applied in OLED packaging. Mater Sci Eng B. 2003;98(3):248–254.
15.
LuY, LiH, YangG.Varied longitudinal microstructure of μc-Si:H films by tuning substrate temperature. Surf Eng. 2015;31(10):763–769.
16.
WeiR.Development of new technologies and practical applications of plasma immersion ion deposition (PIID). Surf Coat Technol. 2010;204(18):2869–2874.
17.
TianX, JingL, LeiT, A novel technique to enhance surface properties of DLC films deposited on the inner wall of cylindrical PET barrel by DC-RF hybrid discharge. Surf Coat Technol. 2011;206(5):1016–1019.
18.
HuangM, ZhangMX, WangY, Electrochemical behaviour of X80 pipeline steel with alumina coating. Surf Eng. 2015;31(4):295–301.
19.
TianS, XuF, SunS, Growth rate and surface free energy of diamond films using different gas-sources. Surf Eng. 2020;36(4):379–385.
20.
ShinJH, LimWJ, KimKH.Microstructure and multifunctional properties of Ti-Si-B-C coatings by plasma-enhanced chemical vapour deposition. Surf Eng. 2017;33(8):605–611.
21.
IrmerG, Dorner-ReiselA.Micro-Raman studies on DLC coatings. Adv Eng Mater. 2010;7(8):694–705.
22.
CasiraghiC, FerrariAC, RobertsonJ.Raman spectroscopy of hydrogenated amorphous carbons. Phys Rev B. 2005;72(8):85401.
23.
FerrariA, RodilS, RobertsonJ.Interpretation of infrared and Raman spectra of amorphous carbon nitrides. Phys Rev B. 2000;67(15):155300–1553006.
24.
HopfC, von KeudellA, JacobW.Direct verification of the ion-neutral synergism during hydrocarbon film growth. J Appl Phys. 2003;93(6):3352.
25.
BoutardD, MollerW, ScherzerBMU.Influence of H-C bonds on the stopping power of hard and soft carbonized layers. Phys Rev B Condens Matter. 1998;38(5):2988–2994.
26.
JonssonB, HogmarkS.Hardness measurements of thin films. Thin Solid Films. 1984;114(3):257–269.
27.
FedorchenkoAI, WangAB, ChengHH.Thickness dependence of nanofilm elastic modulus. Appl Phys Lett. 2009;94(15):1790.
28.
NiW, ChengYT, LukitschMJ, Effects of the ratio of hardness to Young's modulus on the friction and wear behavior of bilayer coatings. Appl Phys Lett. 2004;85(18):4028–4030.
29.
MusilJ.Hard and superhard nanocomposite coatings. Surf Coat Technol. 2000;125(1):322–330.
30.
RobertsonJ.Mechanical properties and coordinations of amorphous carbons. Phys Rev Lett. 1992;68(2):220–223.
31.
ZhangTF, DengQY, LiuB, Wear and corrosion properties of diamond like carbon (DLC) coating on stainless steel, CoCrMo and Ti6Al4 V substrates. Surf Coat Technol. 2015;273(1):12–19.
32.
SundaramVS.Diamond like carbon film as a protective coating for high strength steel and titanium alloy. Surf Coat Technol. 2006;201(6):2707–2711.
33.
LiuY, ErdemirA, MeletisEI.An investigation of the relationship between graphitization and frictional behavior of DLC coatings. Surf Coat Technol. 1996;86-87(96):564–568.
34.
ManhaboscoTM, MullerIL.Electrodeposition of diamond-like carbon (DLC) films on Ti. Appl Surf Sci. 2009;255(7):4082–4086.
35.
TangXS, WangHJ, FengL, Mo doped DLC nanocomposite coatings with improved mechanical and blood compatibility properties. Appl Surf Sci. 2014;311(1):758–762.
36.
ZouCW, WangHJ, FengL, Effects of Cr concentrations on the microstructure, hardness, and temperature-dependent tribological properties of Cr-DLC coatings. Appl Surf Sci. 2013;286(1):137–141.
