Silicon carbide (SiC) ceramic exhibits several outstanding properties, such as superior chemical and thermal stabilities, high radiation resistance and low thermal expansion, that qualify it as a prime candidate for space applications. Optical quality with surface figure accuracy of the order of 60 nm peak-to-valley (PV) and micro-roughness (root-mean-square, RMS) less than 2 nm is necessary for space optical applications. Sintered SiC (α-HCP) is inherently porous and challenging to make high-grade optics. Hence, it calls for a surface modification of the sintered SiC by means of a clad layer that has superior adhesion to the substrate and facilitates optical polishing. This paper describes a typical method of synthesis and characterization of a thick silicon coating on sintered SiC substrate, directly machinable to aspheric for optical telescope applications. Present approach describes the quantitative opto-mechanical characterization of silicon film over SiC by thermal spray coatings, eventually leading to its space flight-worthiness.
ParsonageTB.Selecting mirror materials for high-performance optical systems. In: PaquinRA, editor. Proceedings of SPIE-dimensional Stability 1335, 34th Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering; 1990 Jul 8–13. Vol. 1335. San Diego, CA
: Proceedings of SPIE; 1990. p. 119–126.
2.
PaquinRA.Advanced materials: an overview. In: EaleyMA, PaquinRA, ParsonageTB, editors. Proceedings of SPIE-advanced Materials for Optics and Precision Structures: A Critical Review 10289, Optical Science, Engineering and Instrumentation ‘97; 1997 Jul 27–Aug 1. Vol. 10289. San Diego, CA
: Proceedings of SPIE; 1997. p. 1–15.
3.
GoelaJS, PickeringMA, TaylorRL.Properties of chemical vapour deposited silicon carbide for optical applications in severe environments. Appl Opt. 1991;30(22):3166–3175.
4.
DanielAE, MichaelJM, GogotsiY.Carbon coatings produced by high temperature chlorination of silicon carbide ceramics. Mater Res Innov. 2001;5(2):55–62.
5.
Jung-HyeE, Young-WookK, SantoshR.Processing and properties of macroporous silicon carbide ceramics: a review. J Asian Cram Soc. 2013;1(3):220–242.
6.
KhalifaHE, DeckCP, ChenKC, Silicon carbide composite fabrication and mechanical thermal performance for nuclear reactor applications. Fusion Sci Technol. 2012;61(1T):375–380.
7.
MehreganyM, ZormanMA, RoyyS, Silicon carbide for microelectromechanical systems. Int Mater Rev. 2000;45(3):85–108.
8.
Avino-SalvadoO, ChengC, ButtayC, Sic MOSFETs robustness for diode-less applications. EPE J. 2018;28(3):128–135.
9.
FeberRR, HamiltonGN.Silicon carbide high temperature neutron detectors for reactor instrumentation. Nucl Appl. 1966;2(3):246–251.
GuojiaoD, KequangZ, Stereolithography 3D printing of SiC ceramic with potential for lightweight optical mirror. Ceram Int. 2020;46(11):1–6.
12.
MatsonLE, ChenMY, de BlonkB, Silicon carbide technologies for light-weighted aerospace mirrors. In: Ryan S, editor. Proceedings of the Advanced Maui Optical and Space Surveillance Technologies Conference, Maui, 2008 Sep . p. 17–19.
13.
WangY, Yu-MinZ, Jie-CaiH, Fabrication and test of reaction bond silicon carbide for optical applications. Trans Nonferrous Met Soc China. 2006;16(2):409–413.
14.
JohnsonSG.SiC coatings on RB SiC mirrors for ultrasmooth surfaces. In: WilkersonGW, editor. Proceedings of SPIE-passive Materials for Optical Elements II 2018, International Symposium on Optics, Imaging, and Instrumentation; 1993 Jul 11–16. Vol. 2018. San Diego, CA
: Proceedings of SPIE; 1993. p. 237–247.
15.
XuLD, ZhangXJ, WangX.Surface coating technique of reaction bonded SiC mirrors. Opto-Electr Eng. 2009;36(1):120–124.
16.
TangH, HuangZ, TanS, PVD SiC and PVD Si coatings on RB SiC for surface modification. In: YangL, WenS, ChenY, editors. Proceedings of SPIE-2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 2005 Nov 2–5. Vol. 6149. Xian
: Proceedings of SPIE; 2005. p. A1–A6.
17.
LusquinosF, PouJ, QuinteroF, Laser cladding of SiC/Si composite coating on Si-SiC ceramic substrates. Surf Coat Technol. 2008;202(9):1588–1593.
18.
DingJT, FanXW, PangZH, Manufacturing and testing of surface modified silicon carbide aspheric mirror. Ninth International Symposium Advanced Optical Manufacturing and Testing Technologies SPIE, Chengdu. Vol. 10837, 2019. p. 1–10.
19.
KangN, LiS, ZhengZ, High-precision and supersmooth fabrication of CVD SiC flat reflecting mirror. Chin J Mech Eng. 2009;20(1):69–73.
20.
JiangF, LiuY, YangY, Research progress of optical fabrication and surface microstructure modification of SiC. J Nanomater. 2012;2012:1–9. Special issue.
21.
LiuG, HuangZR, LiuX, Removal behaviours of different SiC ceramics during polishing. J Mater Sci Technol. 2010;26(2):125–130.
22.
WangX, WangC, ShenX, Potential material for fabricating optical mirrors: polished diamond coated silicon carbide. Appl Opt. 2017;56(14):4113–4122.
23.
RenY, YuX, LiuF, Low-temperature ß-SiC interlayer for diamond film on cemented carbide. Surf Eng. 2017;35(6):1–8.
24.
RickerbyDS, MatthewsA.Advanced surface coatings: handbook of surface engineering. New York (NY
): Springer; 1993.
25.
NayakBB.In-situ deposition of multiphase carbon composite coating on SiC grains through thermal plasma dissociation of SiC. Surf Eng. 2004;20(2):139–142.
26.
LiuG, HuangZR, WuJH, Surface morphology evolution and properties of silicon coating on silicon carbide ceramics by advanced plasma source ion plating. Surf Coat Technol. 2012;207:204–210.
27.
TrefferG, NeuhauserJ, MarxG.XRD studies of SiC/Si layers on carbon substrates. Mikrochim Acta. 1997;125:325–330.
28.
ChoiSG, WangSJ, ParkH, Properties of amorphous silicon thin films synthesized by reactive particle beam assisted chemical vapour deposition. Thin Solid Films. 2010;518(24):7372–7376.
29.
KiranMSRN, HaberlB, BradbyJE, Chapter 5: Nanoindentation of silicon and germanium. In: RomanoL, PriviteraV, JagadishC, editors. Semiconductors and Semimetals Vol. 91. Amsterdam
: Elsevier; 2015. p. 165–203.
30.
TatianaS, HarshaVRM, PhilipM.Thin film metallic glass broad-spectrum mirror coatings for space telescope applications. J Non-Cryst Solids. 2020;7:1–8. DOI:10.1016/j.nocx.2020.100050.
31.
GengQ, WangW.Experimental study on planetary electric discharge machining of substrate of large-aperture silicon carbide (SiC) mirrors. Int J Adv Manuf Tech. 2017;94:711–717.
32.
OliverWC, PharrGM.An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments. J Mater Res. 1992;7(6):1564–1583.
33.
DeyA, MukhopadhyayAK.Chapter 6: nanoindentation data analysis methods. In: DeyA, MukhopadhyayAK, editors. Nanoindentation of brittle solids Vol. 91. Boca Raton (FL
): CRC Press/Taylor & Francis; 2014. p. 45–52.
34.
SarkarS, DeyA, DasPK, Evaluation of micromechanical properties of carbon/carbon and carbon/carbon-silicon carbide composites at ultra-low load. Int J Appl Ceram Technol. 2011;8(2):282–297.
35.
DeyA, MukhopadhyayAK.Chapter 12: energy issues in nanoindentation. In: DeyA, MukhopadhyayAK, editors. Nanoindentation of brittle solids. Boca Raton (FL
): CRC Press/Taylor & Francis; 2014. p. 93–101.
36.
ChakrabortyR, DeyA, MukhopadhyayAK.Role of the energy of plastic deformation and the effect of loading rate on nanohardness of soda-lime-silica glass. Phys Chem Glasses-B. 2010;51(6):293–303.
37.
NathS, DeyA, MukhopadhyayAK, Nanoindentation response of novel hydroxyapatite–mullite composites. Mater Sci Eng A. 2009;513–514:197–201.
YanJ, TakahashiH, GaiX, Load effects on the phase transformation of single-crystal silicon during nanoindentation tests. Mater Sci Eng A. 2006;423(1–2):19–23.
GuoS, KagawaY.Young's moduli of zirconia top-coat and thermally grown oxide in a plasma-sprayed thermal barrier coating system. Scripta Mater. 2004;50(11):1401–1406.
43.
DeyA, MukhopadhyayAK, GangadharanS, Nanoindentation study of microplasma sprayed hydroxyapatite coating. Ceram Int. 2009;35:2295–2304.
44.
ChangL, ZhanL.Mechanical behaviour characterisation of silicon and effect of loading rate on pop-in: a nanoindentation study under ultra-low loads. Mater Sci Eng A. 2009;506(1–2):125–129.
45.
DeyA, MukhopadhyayAK.Chapter 26: nanoindentation of silicon. In: DeyA, MukhopadhyayAK, editors. Nanoindentation of brittle solids. Boca Raton (FL
): CRC Press/Taylor & Francis; 2014. p. 211–216.
46.
DimitreZD, Chen-HsunD.Crystalline silicon solar cells with micro/nano texture. Appl Surf Sci. 2013;266:1–4.
47.
YongC, YurongZ, FengzhenL, Progress and mechanism of Cu assisted chemical etching of silicon in a low Cu2+ concentration region. ECS J Solid State SC. 2015;4(8):331–336.
