Three kinds of AlCoFeNiTiZr high-entropy alloy films with different elements ratios were prepared using magnetron sputtering. The films were composed of fcc solid solution phases and amorphous phases with typical uniform polycrystal microstructure. The anticorrosion performances of the films were tested in a NaCl solution. The changes of microstructures and composition were quantitatively characterised by XPS, SEM and TEM. During the corrosion reaction process there was a decrease in the contents of Al, Ti, Zr and Fe elements. The increase in Fe-Co-Ni content lead to an increase of passivation area, and a subsequent increase in corrosion potential (Ecorr) and a decrease in the corrosion current density (Icorr). A decrease in the crystal lattice distortion, vacancy, dislocation and grain boundary segregation was also noted increasing corrosion resistance. Additionally, both the grain refinement and the total grain boundary length in the film reduced, and as a result the corrosion resistance improved.
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