In this study, we co-sputtered zinc dioxide and copper in order to manufacture a composite thin film. We then used atomic force microscopy (AFM), scanning electron microscopy and energy-dispersive X-ray spectroscopy to investigate the surface morphology of samples. We annealed four samples to temperatures
and
for 90 minutes. Afterwards, we employed height distribution, roughness, permutation entropy(PE) and fractality of the height data from AFM to analyse samples theoretically. Our results reveal that although the roughness will increase by temperature and the multifractal spectrum widens by it; the PE does not change both from
to
and from
to
. Both PE and height distribution are changing meaningfully only in increasing the temperature from
to
.
KlingshirnC.ZnO: from basics towards applications. Phys Stat Solidi (b). 2007;244(9):3027–3073. doi: 10.1002/pssb.200743072
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MallikaA, RamachandraReddyA, SowriBabuK, et al. Synthesis and optical characterization of aluminum doped ZnO nanoparticles. Ceram Int. 2014;40(8):12171–12177. doi: 10.1016/j.ceramint.2014.04.057
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MaL, MaS, ChenH, et al. Microstructures and optical properties of Cu-doped ZnO films prepared by radio frequency reactive magnetron sputtering. Appl Surf Sci. 2011;257(23):10036–10041. doi: 10.1016/j.apsusc.2011.06.134
24.
BahşiZB, OralAY.Effects of Mn and Cu doping on the microstructures and optical properties of sol–gel derived zno thin films. Opt Mater (Amst). 2007;29(6):672–678. doi: 10.1016/j.optmat.2005.11.016
and
for 90 minutes. Afterwards, we employed height distribution, roughness, permutation entropy(PE) and fractality of the height data from AFM to analyse samples theoretically. Our results reveal that although the roughness will increase by temperature and the multifractal spectrum widens by it; the PE does not change both from
to
and from
to
. Both PE and height distribution are changing meaningfully only in increasing the temperature from
to
.