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Research article

First published 2011-12

Development and validation of a 200 mm wafer-scale finite element model of contact pressure distribution in chemical mechanical polishing

G Byrne, E Ahearne, P Timoney

Proceedings of the Institution of Mechanical Engineers,Part B: Journal of Engineering Manufacture

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Research article

First published 2023-10

Yangjian Li, Liang Zhu, Xuechun Zhang [...]

Proceedings of the Institution of Mechanical Engineers,Part B: Journal of Engineering Manufacture

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Research article

First published 2008-6

H-J Tsai, Y-R Jeng, P-Y Huang

Proceedings of the Institution of Mechanical Engineers,Part J: Journal of Engineering Tribology

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Research article

First published 2013-7

Jeremiah N Mpagazehe, C Fred Higgs

Proceedings of the Institution of Mechanical Engineers,Part J: Journal of Engineering Tribology

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Research article

First published 2001-10

N. Moumen, A.A. Busnaina

Surface Engineering

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Research article

First published 2012-10

C. Atkinson, J. M. Martínez-Esnaola, M. R. Elizalde

Materials Science and Technology