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1-3 of 3 results for ultraprecision grinding

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Free access

Research article

First published 2004-3

Ultraprecision grinding technologies in silicon semiconductor processing

E Ahearne, G Byrne

Proceedings of the Institution of Mechanical Engineers,Part B: Journal of Engineering Manufacture

Free access

Research article

First published 2004-4

L Yin, E Y J Vancoille, K Ramesh [...]

Proceedings of the Institution of Mechanical Engineers,Part B: Journal of Engineering Manufacture

Retricted access

Research article

First published 2000-4

B Zhang, A Nakajima

Proceedings of the Institution of Mechanical Engineers,Part J: Journal of Engineering Tribology