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1-2 of 2 results for high resolution electron beam lithography

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Research article

First published 2006-6

Control of negative poly(methyl methacrylate) for the elaboration of planar electrodes separated by a sub-10 nm gap

J Grisolia, C Martin, L Ressier [...]

Proceedings of the Institution of Mechanical Engineers,Part N: Journal of Nanomaterials,Nanoengineering and Nanosystems

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Research article

First published 2004-11

T. L. Tan, D. Wong, P. Lee [...]

Applied Spectroscopy