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Research article

First published 2025-4

Modeling and optimizing of laser-assisted waterjet process parameters for near-damage-free micromachining of monocrystalline silicon

Xuefei Liu, Chuanzhen Huang, Hanlian Liu [...]

Proceedings of the Institution of Mechanical Engineers,Part B: Journal of Engineering Manufacture

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Research article

First published 2024

Shucai Yang, Feng Liu, Yuchao Guo

Proceedings of the Institution of Mechanical Engineers,Part E: Journal of Process Mechanical Engineering