Filter Results

Search all journals

Enter search terms…

Advanced search

/

About

About Sage
About Sage Journals
Privacy Policy
Terms of Use
Contact Us
Help

Information for

Authors
Editors
Librarians
Researchers
Reviewers
Frequently asked questions

All content on this site: Copyright © 2026 Sage Publications. All rights reserved. This website is technically supported and operated by China National Publications Import and Export (Group) Co., Ltd. 京ICP备09090397号-11

Search results

Search results page

Articles (2)

Journals (0)

1-2 of 2 results for deep RIE

Sort by:

Relevance

Select all

Select all

Sort by:

Relevance

Select article: Prototype detector technology for the SCUBA-2 submillimetre bolometer array

Restricted access

Research article

First published March, 2005

Prototype detector technology for the SCUBA-2 submillimetre bolometer array

A. J. Walton, W Parkes, J. G. Terry [...]

Proceedings of the Institution of Mechanical Engineers,Part N: Journal of Nanomaterials,Nanoengineering and Nanosystems

Select article: Fabrication Methods for High Aspect Ratio Microstructures

Restricted access

Research article

First published February, 1997

Fabrication Methods for High Aspect Ratio Microstructures

Satori Watanabe, Masayoshi Esashi, Yoshio Yamashita

Journal of Intelligent Material Systems and Structures

1
10 / page

Filter Results

Article type

Publication date

Subjects

Access