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1-2 of 2 results for convex corner etching

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Select article: Silicon (100) undercutting modelling and corner compensation structures design in wet anisotropic etching process

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Research article

First published July, 2011

Silicon (100) undercutting modelling and corner compensation structures design in wet anisotropic etching process

M Shayan, B Arezoo, A Sadough Vanini [...]

Proceedings of the Institution of Mechanical Engineers,Part B: Journal of Engineering Manufacture

Select article: Fabrication of SiGe quantum wires and dots by low pressure chemical vapour deposition on patterned silicon substrates

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Research article

First published April, 1995

Fabrication of SiGe quantum wires and dots by low pressure chemical vapour deposition on patterned silicon substrates

A. Hartmann, L. Vescan, C. Dieker [...]

Materials Science and Technology

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