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Research article

First published 2011-7

Silicon (100) undercutting modelling and corner compensation structures design in wet anisotropic etching process

M Shayan, B Arezoo, A Sadough Vanini [...]

Proceedings of the Institution of Mechanical Engineers,Part B: Journal of Engineering Manufacture

Retricted access

Research article

First published 1995-4

A. Hartmann, L. Vescan, C. Dieker [...]

Materials Science and Technology