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Research article

First published 2011-5

Selective layer chemical mechanical planarization process mimicked with atomic force microscope

F Ilie, C Tita

Proceedings of the Institution of Mechanical Engineers,Part J: Journal of Engineering Tribology

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Research article

First published 2023-10

Profile control processes based on contact types in silicon wafer DSP manufacturing management

Yangjian Li, Liang Zhu, Xuechun Zhang [...]

Proceedings of the Institution of Mechanical Engineers,Part B: Journal of Engineering Manufacture

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Research article

First published 2019-10

Coupled thermal- and deformation-induced degradation in planar rubber membranes under radial loading

Alan Wineman, John Shaw

Mathematics and Mechanics of Solids

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Research article

First published 2024-7

Design and implementation of a 2-DOF 5R parallel mechanism with a coaxial-driven layout

Zefeng Zhang, Zhili Hou, Lina Li [...]

Proceedings of the Institution of Mechanical Engineers,Part C: Journal of Mechanical Engineering Science

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Research article

First published 2008-6

An improved model considering elastic—plastic contact and partial hydrodynamic lubrication for chemical mechanical polishing

H-J Tsai, Y-R Jeng, P-Y Huang

Proceedings of the Institution of Mechanical Engineers,Part J: Journal of Engineering Tribology

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Research article

First published 2011-12

Development and validation of a 200 mm wafer-scale finite element model of contact pressure distribution in chemical mechanical polishing

G Byrne, E Ahearne, P Timoney

Proceedings of the Institution of Mechanical Engineers,Part B: Journal of Engineering Manufacture

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Research article

First published 2019-11

Synthesis and properties of benzocyclobutene-terminated imide-containing cyano group

Xianfeng Que, Zhiming Qiu, Yurong Yan

High Performance Polymers

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Research article

First published 2011-12

Evaluation of a Thin and Mechanically Stable Collagen Cell Carrier

Timo Schmidt, Susanne Stachon, Andreas Mack [...]

Tissue Engineering Part C: Methods

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Research article

First published 1975-1

The Nature and Crystal Growth of Otoconia in the Rat

Muriel D. Ross, Donald R. Peacor

Annals of Otology,Rhinology & Laryngology

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Research article

First published 2014-10

Effects of mixed inhibitors in copper chemical mechanical polishing at a low down pressure

Hua Gong, Guoshun Pan, Zhonghua Gu [...]

Proceedings of the Institution of Mechanical Engineers,Part J: Journal of Engineering Tribology

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