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1-2 of 2 results for Ultrahigh vacuum chemical vapour deposition

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Research article

First published 2012-4

Effect of nanomechanical and microstructural properties on annealed multilayer Si0·8Ge0·2–Si films

T-Y Lin, C-H Tsai, W-H Yau [...]

Surface Engineering

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Research article

First published 1995-4

J. Gondermann, B. Spangenberg, T. Köster [...]

Materials Science and Technology