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Research article

First published 2022-12

Mechanism of chemical and mechanical mutual promotion in photocatalysis-assisted chemical mechanical polishing for single-crystal SiC

Yan He, Zewei Yuan, Meiling Tang [...]

Proceedings of the Institution of Mechanical Engineers,Part C: Journal of Mechanical Engineering Science

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Research article

First published 2021-8

Preparation and polishing properties of water-based magnetorheological chemical finishing fluid with high catalytic activity for single-crystal SiC

Jiayun Deng, Jiabin Lu, Qiusheng Yan [...]

Journal of Intelligent Material Systems and Structures

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Research article

First published 2018-11

Investigation of Ga ion implantation-induced damage in single-crystal 6H-SiC

Zhongdu He, Zongwei Xu, Mathias Rommel [...]

Journal of Micromanufacturing

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Research article

First published 2014-8

Purification and particle size control of β-SiC powder using thermocycling process

E. J. Jung, Y. J. Lee, S. R. Kim [...]

Advances in Applied Ceramics: Structural,Functional and Bioceramics

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Research article

First published 2024-3

Influence of crystallographic effect on tool wear,cutting stress,cutting temperature,cutting force and subsurface damage in nano cutting of single crystal silicon carbide

Dongju Chen, Yazhong He, Ri Pan [...]

Proceedings of the Institution of Mechanical Engineers,Part C: Journal of Mechanical Engineering Science

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Research article

First published 2011-2

Investigation of micropipe defect terminating during SiC crystal growth

S. H. Lin, Z. M. Chen, P. Liang [...]

Materials Science and Technology

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Research article

First published 2001-1

Tribology on the macroscale to nanoscale of microelectromechanical system materials: A review

B Bhushan

Proceedings of the Institution of Mechanical Engineers,Part J: Journal of Engineering Tribology

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Research article

First published 2020-5

Effect of silicon carbide hard particles scratch on the diamond cutting tools groove wear

Jiachun Wang, Huarui Chi, Maoqiang Lv [...]

Proceedings of the Institution of Mechanical Engineers,Part C: Journal of Mechanical Engineering Science

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Research article

First published 1968-10

Rheology of Dispersions of High Aspect Ratio Submicroscopic Whiskers

George Baum

Journal of Composite Materials

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Research article

First published 2024

Influence of irradiation wavelength during laser-assisted doping of 4H-silicon carbide in liquid phase

Sree Harsha Choutapalli, Prashantha Kumar H G, Daisuke Nakamura [...]

Journal of Micromanufacturing

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