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1-3 of 3 results for Semi-conductor cleaning

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Research article

First published 1996-2

Experimental Measurements and Theoretical Predictions of the Thermohydraulic Performance of Clean Rooms for the Semi-Conductor Industry

G L Quarini, Y C Chang

Proceedings of the Institution of Mechanical Engineers,Part E: Journal of Process Mechanical Engineering

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Other

First published 2005-7

Youngbok Lee, Sanghee Nah, Hankyu Namkung [...]

Applied Spectroscopy

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Research article

First published 2003-10

Ido Morag, David Shinar, Keren Saat [...]

Proceedings of the Human Factors and Ergonomics Society Annual Meeting