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Select article: Nondispersive Infrared Gas Analyzer for Partial Pressure Measurements of a Tantalum Alkylamide During Vapor Deposition Processes

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Research article

First published October, 2020

Nondispersive Infrared Gas Analyzer for Partial Pressure Measurements of a Tantalum Alkylamide During Vapor Deposition Processes

James E. Maslar, William A. Kimes, Brent A. Sperling [...]

Applied Spectroscopy

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