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1-3 of 3 results for Metal alkylamide

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Research article

First published 2012-3

Quantum Cascade Laser-Based Measurement of Metal Alkylamide Density during Atomic Layer Deposition

James E. Maslar, William A. Kimes, Brent A. Sperling

Applied Spectroscopy

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Research article

First published 2015-3

James E. Maslar, John Hoang, William A. Kimes [...]

Applied Spectroscopy

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Research article

First published 2020-10

James E. Maslar, William A. Kimes, Brent A. Sperling [...]

Applied Spectroscopy