Search results

Articles (2)

Journals (0)

1-2 of 2 results for MAGNETICALLY ENHANCED REACTIVE ION ETCHING

Sort by:

Relevance

Select all

Sort by:

Relevance

Restricted accessResearch articleFirst published August, 2006

Process limitations of magnetically enhanced reactive ion etch equipment

B. Kim, J. Y. Park, S. J. Hong

Surface Engineering

Restricted accessResearch articleFirst published October, 2005

B. Kim, J. Park

Surface Engineering