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Cu sacrificial layer
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Select article: Design analysis and fabrication of side-drive electrostatic micromotor by UV-SLIGA
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Research article
First published November, 2022
Design analysis and fabrication of side-drive electrostatic micromotor by UV-SLIGA
Rahul Shukla
,
Gowtham Beera,
Ankit Dubey
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Journal of Micromanufacturing
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