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1-2 of 2 results for Cu–Ta thin film

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Select article: Microstructure and properties of nanocrystalline Cu–Ta thin films prepared by direct current magnetron sputtering

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Research article

First published 2021-2

Microstructure and properties of nanocrystalline Cu–Ta thin films prepared by direct current magnetron sputtering

Wu Tian, Jiaoyan Dai, Lijun Zhang [...]

Surface Engineering

Select article: Effect of Si target sputtering power on diffusion barrier properties of Ta–Si–N thin films

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Research article

First published 2009-3

Effect of Si target sputtering power on diffusion barrier properties of Ta–Si–N thin films

J. C. Zhou, Z. Liu, Y. Z. Li [...]

Materials Science and Technology

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